Research

Astronomy & Space Sciences

Title :

Drive, readout and control electronics for capacitive MEMS gyroscope

Area of research :

Astronomy & Space Sciences

Focus area :

Sensor Circuits and Signal Processing

Details

Executive Summary :

SCL is working on development of MEMS Gyroscope. It is proposed to designelectronics for same. Scope of project shallbe design, implement and demonstrate lownoise electronics for capacitive MEMSgyroscope. Circuit should have capability for closed loop drive with frequency andamplitude control. Open and Close loop sense. C-V converter with sub-atto-Faradcapacitive resolution with resonatorfrequency upto 15 kHz. Analogue angular velocity output. Provision for electrostatic tuning tocontrol frequency mismatch betweendrive and sense. Provision for quadraturecompensation.

Co-PI:

Shri Rahul Khandelwal, Semi Conductor Laboratory (SCL), Chandigarh

Organizations involved