Research

Engineering Sciences

Title :

Next Generation, Cutting-Edge Indigenous EUVL Resist Technology for Semiconductor Industry

Area of research :

Engineering Sciences, Physical Sciences

Focus area :

EUVL Resist Technology

Principal Investigator :

Dr Satinder Kumar Sharma, Assistant Professor, Indian Institute of Technology (IIT) Mandi

Timeline Start Year :

2016

Timeline End Year :

2019

Contact info :

Details

Total Budget (INR):

91,86,760

Organizations involved