Research
Title : | Development of indigenous DUV photoresists for 180 nm process technology at semi-conductor lab (SCL) mandi: Make in India SCL Mohali |
Area of research : | Physical Sciences, Chemical Sciences |
Focus area : | Photolithography |
Principal Investigator : | Dr. Subrata Ghosh, Associate Professor, School of Basic Sciences, Indian Institute of Technology (IIT) Mandi, Himachal Pradesh |
Timeline Start Year : | 2015 |
Timeline End Year : | 2019 |
Contact info : | subrata@iitmandi.ac.in |
Details
Total Budget (INR): | 81,00,000 |
Organizations involved
Implementing Agency : | Institute of Technology (IIT) Mandi, Himachal Pradesh Funding Agency :Indian Space Research Organisation (ISRO) | |