Research
Title : | Next generation, cutting-edge indigenous EUVL resists technology for semiconductor industry |
Area of research : | Physical Sciences, Engineering Sciences |
Focus area : | Semiconductor industry |
Principal Investigator : | Dr. Satinder Sharma, Associate Professor, School of Computing & Electrical Engineering, Indian Institute of Technology (IIT) Mandi, Himachal Pradesh |
Timeline Start Year : | 2016 |
Timeline End Year : | 2019 |
Contact info : | satinder@iitmandi.ac.in |
Details
Total Budget (INR): | 91,86,760 |
Organizations involved
Implementing Agency : | Institute of Technology (IIT) Mandi, Himachal Pradesh Funding Agency :Department of Science and Technology (DST) | |