Life Sciences & Biotechnology
Title : | Development of two types of post etch residue strippers suitable for cleaning and removal of residues after plasma etching & photo resist ashing of metal & dielectric layers |
Area of research : | Life Sciences & Biotechnology, Chemical Sciences |
Focus area : | Residue strippers |
Principal Investigator : | Dr. Subrata Ghosh, Associate Professor, School of Basic Sciences, Indian Institute of Technology (IIT) Mandi, Himachal Pradesh |
Timeline Start Year : | 2018 |
Timeline End Year : | 2020 |
Contact info : | subrata@iitmandi.ac.in |
Details
Total Budget (INR): | 39,00,000 |
Organizations involved