Research

Astronomy & Space Sciences

Title :

Fabrication and performance optimization of Thin Film Bulk Acoustic Wave (BAW) resonators and filters

Area of research :

Astronomy & Space Sciences

Focus area :

Microelectronics

Principal Investigator :

Dr. Meghana A Hasamnis, Professor and Head, Electronics Engineering Dept., Shri Ramdeobaba College of Engineering and Management, Nagpur, Maharasthra

Timeline Start Year :

2024

Contact info :

Details

Executive Summary :

Thin film Bulk Acoustic Wave (BAW) filters offer compact high performance filtering, typically beyond 1 GHz. Latest research work has shown their promise well beyond X-band of frequencies. Aluminium Nitride (AlN) piezoelectric thin film based resonators form the building blocks of these filters. Film Bulk Acoustic Resonator (FBAR) and Solidly Mounted Resonator (SMR) are the two approaches employed for the realization of these resonators. The scope of the proposed research work shall be to carry out the fabrication of FBAR/SMR based BAW filters, based on the target filter specifications provided by SAC. The researchers shall be responsible for carrying out resonator stack design and optimization, resonator RF performance prediction, optimization of fabrication processes and finally fabrication of resonators/filters. The performance of the fabricated resonators/filters shall be verified against target specifications.

Co-PI:

Shri Santanu Sinha, Space Applications Centre, ISRO, Ahmedabad Shri Raj Kumar, Space Applications Centre, ISRO, Ahmedabad

Total Budget (INR):

32,86,000

Achievements :

The project being undertaken by ISRO in collaboration with academia is directly or indirectly beneficial to the society.

Organizations involved