Research
Title : | Next Generation, Cutting-Edge Indigenous EUVL Resist Technology for Semiconductor Industry |
Area of research : | Engineering Sciences, Physical Sciences |
Focus area : | EUVL Resist Technology |
Principal Investigator : | Dr Satinder Kumar Sharma, Assistant Professor, Indian Institute of Technology (IIT) Mandi |
Timeline Start Year : | 2016 |
Timeline End Year : | 2019 |
Contact info : | satinder@iitmandi.ac.in |
Details
Total Budget (INR): | 91,86,760 |
Organizations involved
Implementing Agency : | Indian Institute of Technology (IIT) Mandi Funding Agency :Department of Science and Technology (DST) | |